Welcome

The Applied Micro and Nanosystems Facility (AMNF) is a class-100 micro/nanofabrication facility located at UBC’s Okanagan campus. The facility has microelectromechanical systems (MEMS) fabrication capabilities for thin-film deposition, photolithography, chemical processing, electronic prototyping and laser micromilling. The multi-user facility supports numerous areas of applied sciences.

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Equipment Booking

Dr. Ian Foulds is the facility's senior administrator and Chris Seib is responsible for the facility's day to day operations. Individuals seeking access can be trained for use of five processing stations, thin film depositions will typically be conducted to UBC staff:

  1. Deposition Station (Electron Beam Evaporation with additional thermal sources or PVD/Sputter in DC or RF)
  2. Photolithography Station,
  3. Chemical Processing Station,
  4. Electronics Prototyping Station, and
  5. Laser Micromilling Station (School of Engineering Machine Shop), and
  6. Stereo Microscope Station

AMNF stations must be booked in advance according to equipment booking procedures.

Safety

AMNF stations are subject to safety procedures.

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